Four-Point Probe Correction Factors for Use in Measuring Large Diameter Doped Semiconductor Wafers

✍ Scribed by Perloff, David S.

• Book ID: 121452229
• Publisher: The Electrochemical Society
• Year: 1976
• Tongue: English
• Weight: 691 KB
• Volume: 123
• Category: Article
• ISSN: 0013-4651
• DOI: 10.1149/1.2132683