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Resist residues and transistor gate fabrication

✍ Scribed by Macintyre, D. S.; Ignatova, O.; Thoms, S.; Thayne, I. G.

Book ID: 120512821
Publisher: AVS (American Vacuum Society)
Year: 2009
Tongue: English
Weight: 662 KB
Volume: 27
Category: Article
ISSN: 0734-211X
DOI: 10.1116/1.3243176

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