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Resist polymers: Part VII—Thermolysis of fluoroalkyl methacrylates

✍ Scribed by Pradeep K. Dhal; G.N. Babu; James C.W. Chien


Publisher
Elsevier Science
Year
1986
Tongue
English
Weight
378 KB
Volume
16
Category
Article
ISSN
0141-3910

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