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Resist polymers: Part IX—Thermolysis of chlorine-containing acrylate polymers

✍ Scribed by V.L. Rao; P.K. Dhal; G.N. Babu; James C.W. Chien


Publisher
Elsevier Science
Year
1987
Tongue
English
Weight
481 KB
Volume
18
Category
Article
ISSN
0141-3910

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