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Residual stress in coated low-Z films of TiC and TiN: III. PVD coated films

โœ Scribed by Isao Yoshizawa; Masao Fukutomi; Kohji Kamada


Publisher
Elsevier Science
Year
1984
Tongue
English
Weight
341 KB
Volume
123
Category
Article
ISSN
0022-3115

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