✦ LIBER ✦

Residual stress analysis of TiN film fabricated by plasma immersion ion implantation and deposition process

✍ Scribed by Liu, Hongxi; Xu, Qian; Zhang, Xiaowei; Wang, Chuanqi; Tang, Baoyin

Book ID: 120049895
Publisher: Elsevier Science
Year: 2013
Tongue: English
Weight: 467 KB
Volume: 297
Category: Article
ISSN: 0168-583X
DOI: 10.1016/j.nimb.2012.12.015

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