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Characteristics and surface energy of silicon-doped diamond-like carbon films fabricated by plasma immersion ion implantation and deposition

✍ Scribed by Wan, G.J.; Yang, P.; Fu, Ricky K.Y.; Mei, Y.F.; Qiu, T.; Kwok, S.C.H.; Ho, Joan P.Y.; Huang, N.; Wu, X.L.; Chu, Paul K.

Book ID: 122876985
Publisher: Elsevier Science
Year: 2006
Tongue: English
Weight: 162 KB
Volume: 15
Category: Article
ISSN: 0925-9635
DOI: 10.1016/j.diamond.2005.09.042

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