✦ LIBER ✦

Residual Defects after Light Pulse Annealing of Implanted Silicon

✍ Scribed by Baither, D. ;Panknin, D. ;Wiesee, E.

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Residual defects in implanted silicon af

✍ Baither, D. ;Koegler, R. ;Panknin, D. ;Wieser, E. 📂 Article 📅 1986 🏛 John Wiley and Sons 🌐 English ⚖ 518 KB

Residual defects in implanted GaAs after

✍ Baither, D. ;Panknin, D. 📂 Article 📅 1989 🏛 John Wiley and Sons 🌐 English ⚖ 504 KB

Defect characterization in boron implant

✍ Lei Zhu; Jason Chan; Steve McCoy; Jeff Gelpey; Baonian Guo; Kyuha Shim; N. David 📂 Article 📅 2008 🏛 Elsevier Science 🌐 English ⚖ 392 KB

Pulsed Incoherent Light Annealing of Ars

✍ Klabes, R. ;Matthäi, J. ;Voelskow, M. ;Mutze, S. 📂 Article 📅 1982 🏛 John Wiley and Sons 🌐 English ⚖ 166 KB

Defect Structure Study with Planar Chann

✍ Dvurechenskii, A. V. ;Kashnikov, B. P. ;Pokhil, G. P. ;Popov, V. P. ;Tulinov, A. 📂 Article 📅 1984 🏛 John Wiley and Sons 🌐 English ⚖ 208 KB

Residual lattice disorder in self-implan

✍ Servidori, M. ;Zani, A. ;Garulli, G. 📂 Article 📅 1982 🏛 John Wiley and Sons 🌐 English ⚖ 840 KB