✦ LIBER ✦

Repair of opaque X-ray mask defects: Application and resolution

✍ Scribed by Holger Schaffer; Bernd Breithaupt

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

FIB repair of clear and opaque defects i

✍ P.D. Prewett; M. Gentili; R. Maggiora; L. Mastrogiacomo; J.G. Watson; G.S. Turne 📂 Article 📅 1992 🏛 Elsevier Science 🌐 English ⚖ 510 KB

Identification and removal of opaque def

✍ U. Weigmann; H. Burghause; H. Schaffer 📂 Article 📅 1987 🏛 Elsevier Science 🌐 English ⚖ 456 KB

Repair of clear X-ray mask defects by la

✍ H.-C. Petzold; R. Putzar; U. Weigmann; I. Wilke 📂 Article 📅 1987 🏛 Elsevier Science 🌐 English ⚖ 365 KB

Optimization of the laser-induced deposi

✍ R. Putzar; H.-C. Petzold; H. Staiger 📂 Article 📅 1990 🏛 Elsevier Science 🌐 English ⚖ 532 KB

Application of e-beam nanolithography fo

✍ C. Köhler; W. Brünger; Ch. Ehrlich; H. Huber; K. Reimer 📂 Article 📅 1993 🏛 Elsevier Science 🌐 English ⚖ 402 KB

Laser induced photolytic tin deposition

✍ R. Putzar; H.-C. Petzold; H. Schaffer; U. Weigmann 📂 Article 📅 1989 🏛 Elsevier Science 🌐 English ⚖ 765 KB