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Relief of the internal stress in ternary boron carbonitride thin films

โœ Scribed by Deyan He; Wenjuan Cheng; Juan Qin; Jinshun Yue; Erqing Xie; Guanghua Chen


Book ID
108417750
Publisher
Elsevier Science
Year
2002
Tongue
English
Weight
245 KB
Volume
191
Category
Article
ISSN
0169-4332

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