Reliability issues of furnace nitridated oxides prepared with reduced thermal budget in N2O ambient

✍ Scribed by E. Vincent; C. Papadas; C. Riva; F. Pio; G. Ghibaudo

• Publisher: Elsevier Science
• Year: 1996
• Tongue: English
• Weight: 447 KB
• Volume: 39
• Category: Article
• ISSN: 0038-1101
• DOI: 10.1016/0038-1101(95)00412-2