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Reliability Aspects of Capacitive MEMS Devices

✍ Scribed by Wilhelmus de Groot; Daniel Felnhofer; Evgeni Gusev

Book ID: 119355531
Publisher: Elsevier
Year: 2011
Tongue: English
Weight: 296 KB
Volume: 25
Category: Article
ISSN: 1877-7058
DOI: 10.1016/j.proeng.2011.12.045

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