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Relaxed silicon-germanium on insulator substrate by layer transfer

✍ Scribed by Zhiyuan Cheng; Gianni Taraschi; Matthew T. Currie; Chris W. Leitz; Minjoo L. Lee; Arthur Pitera; Thomas A. Langdo; Judy L. Hoyt; Dimitri A. Antoniadis; Eugene A. Fitzgerald

Book ID: 107452687
Publisher: Springer US
Year: 2001
Tongue: English
Weight: 325 KB
Volume: 30
Category: Article
ISSN: 0361-5235
DOI: 10.1007/s11664-001-0182-0

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