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High-quality crystalline layer transfer from a silicon-on-insulator substrate onto a sapphire substrate using wafer bonding

✍ Scribed by D. V. Singh; L. Shi; K. W. Guarini; P. M. Mooney; S. J. Koester; A. Grill

Book ID: 107452918
Publisher: Springer US
Year: 2003
Tongue: English
Weight: 108 KB
Volume: 32
Category: Article
ISSN: 0361-5235
DOI: 10.1007/s11664-003-0033-2

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