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Relationship of chemical and structural properties with the tribological behavior of sputtered SiCN films

โœ Scribed by H. Hoche; D. Allebrandt; M. Bruns; Ralf Riedel; C. Fasel


Book ID
108278467
Publisher
Elsevier Science
Year
2008
Tongue
English
Weight
624 KB
Volume
202
Category
Article
ISSN
0257-8972

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