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Relationship between photoluminescence and structural properties of the sputtered Zn1−xCdxO films on Si substrates

✍ Scribed by Dewei Ma; Jingyun Huang; Zhizhen Ye; Lei Wang; Binghui Zhao

Publisher
Elsevier Science
Year
2004
Tongue
English
Weight
288 KB
Volume
25
Category
Article
ISSN
0925-3467

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Al-doped ZnO (ZnO:Al) thin films were deposited on Si substrates using the radio-frequency reactive magnetron sputtering technique. Effect of Al contents and annealing treatments on the structural and photoluminescence (PL) properties of ZnO films was investigated. The results showed that crystallin