Reflected Electron Energy-loss Microscop
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Paparazzo, E.
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Article
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1997
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John Wiley and Sons
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English
β 495 KB
π 2 views
The diagnostic potential of reΓected electron energy-loss microscopy (REELM) and scanning Auger microscopy (SAM) are explored with respect to two particular aspects encountered in the surface microchemical analysis of semiconductor materials : determining the kind of coverage, i.e. whether continuou