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Recrystallization of polycrystalline silicon films on ceramics by electron beam

✍ Scribed by Tetsuo Takahashi; Ryuichi Shimokawa; Yasuhiro Matsumoto; Kenichi Ishii; Toshihiro Sekigawa

Book ID: 108472590
Publisher: Elsevier Science
Year: 1997
Tongue: English
Weight: 314 KB
Volume: 48
Category: Article
ISSN: 0927-0248
DOI: 10.1016/s0927-0248(97)00144-x

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