✦ LIBER ✦

Electron-beam assisted physical vapor deposition of polycrystalline silicon films

✍ Scribed by Sheba Jamil; Sanjeev K. Gupta; K. Anbalagan; J. Akhtar

Book ID: 113810388
Publisher: Elsevier Science
Year: 2011
Tongue: English
Weight: 856 KB
Volume: 14
Category: Article
ISSN: 1369-8001
DOI: 10.1016/j.mssp.2011.05.011

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Characterization of silicon oxynitride t

Characterization of silicon oxynitride thin films deposited by electron beam physical vapor deposition technique

✍ K.C. Mohite; Y.B. Khollam; A.B. Mandale; K.R. Patil; M.G. Takwale 📂 Article 📅 2003 🏛 Elsevier Science 🌐 English ⚖ 135 KB

Preferred Orientation of Chemical Vapor

Preferred Orientation of Chemical Vapor Deposited Polycrystalline Silicon Carbide Films

✍ Y. Kajikawa; S. Noda; H. Komiyama 📂 Article 📅 2002 🏛 John Wiley and Sons 🌐 English ⚖ 260 KB 👁 1 views

Modeling of flame assisted chemical vapo

Modeling of flame assisted chemical vapor deposition of silicon films

✍ M. Masi; C. Cavallotti; E. Raffa 📂 Article 📅 2011 🏛 John Wiley and Sons 🌐 English ⚖ 327 KB 👁 1 views

## Abstract The simulation of a flame assisted chemical vapor deposition (FACVD) process is here proposed with reference to the growth of silicon thin films through the silane/chlorosilanes/hydrogen/chlorine route. The goal is to design a reactor able to deposit micromorphous or multicrystalline fi

Electron beam-physical vapor deposition

Electron beam-physical vapor deposition of SiC/SiO2 high emissivity thin film

✍ Jian Yi; XiaoDong He; Yue Sun; Yao Li 📂 Article 📅 2007 🏛 Elsevier Science 🌐 English ⚖ 831 KB

Recrystallization of polycrystalline sil

Recrystallization of polycrystalline silicon films on ceramics by electron beam

✍ Tetsuo Takahashi; Ryuichi Shimokawa; Yasuhiro Matsumoto; Kenichi Ishii; Toshihir 📂 Article 📅 1997 🏛 Elsevier Science 🌐 English ⚖ 314 KB

Ion beam lithography of polycrystalline

Ion beam lithography of polycrystalline CaF2 films deposited on silicon

✍ Thomas, A. ;Zehe, A. ;Schreckenbach, B. ;Erben, J.-W. ;Grötzschel, R. 📂 Article 📅 1989 🏛 John Wiley and Sons 🌐 English ⚖ 639 KB