Microcrystalline and polycrystalline silicon films for solar cells obtained by gas-jet electron-beam PECVD method

✍ Scribed by Bilyalov, R.; Poortmans, J.; Sharafutdinov, R.; Khmel, S.; Schukin, V.; Semenova, O.; Fedina, L.

• Book ID: 114447942
• Publisher: The Institution of Electrical Engineers
• Year: 2003
• Tongue: English
• Weight: 565 KB
• Volume: 150
• Category: Article
• ISSN: 1350-2409
• DOI: 10.1049/ip-cds:20030665