Recrystallization of Oxygen Ion Implanted Ba0.7Sr0.3TiO3 Thin Films
β Scribed by R. Liedtke; S. Hoffmann; R. Waser
- Book ID
- 110090162
- Publisher
- John Wiley and Sons
- Year
- 2004
- Tongue
- English
- Weight
- 242 KB
- Volume
- 83
- Category
- Article
- ISSN
- 0002-7820
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Mechanical properties and surface characterizations of Ba 0.7 Sr 0.3 TiO 3 thin films deposited on silicon substrate by metalorganic decomposition (MOD) method under different annealing temperatures were investigated. Hardness, Young's modulus and the contact stress-strain of the films were achieved
Interdigitated capacitors haΒ¨e been fabricated on ferroelectric thin films of Sr Ba TiO . These deΒ¨ices haΒ¨e been characterized 0 .5 0 .5 3 at microwaΒ¨e frequencies from 50 MHz to 20 GHz, and haΒ¨e a 3.4:1 tuning range oΒ¨er a 1α40 V bias range. This is shown to originate from a relatiΒ¨e dielectric co