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Recrystallization of erbium implantation-induced amorphous silicon on insulator by rapid thermal annealing

✍ Scribed by Y.S. Tang; Zhang Jingping


Book ID
107790461
Publisher
Elsevier Science
Year
1990
Tongue
English
Weight
293 KB
Volume
102
Category
Article
ISSN
0022-0248

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