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Rapid thermal annealing of the through-film silicon implantation on GaAs

✍ Scribed by F.S. Huang; W.S. Chen; T.M. Hsu; C.W. Lee

Book ID: 113281984
Publisher: Elsevier Science
Year: 1991
Tongue: English
Weight: 335 KB
Volume: 59-60
Category: Article
ISSN: 0168-583X
DOI: 10.1016/0168-583x(91)95751-x

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