Recombination activity of “clean” and contaminated misfit dislocations in Si(Ge) structures
✍ Scribed by M. Kittler; C. Ulhaq-Bouillet; V. Higgs
- Publisher
- Elsevier Science
- Year
- 1994
- Tongue
- English
- Weight
- 550 KB
- Volume
- 24
- Category
- Article
- ISSN
- 0921-5107
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✦ Synopsis
The recombination at misfit dislocations in Si(Ge) structures was studied by the technique of electron-beam-induced current. The contrast temperature dependence was interpreted using the Schokley-Read-Hall recombination theory. Different situations were observed: either a dominance of shallow centres (intrinsic property) or of midgap levels (contamination), or a combination of both. D-band luminescence studies support the role of contamination. The very small recombination at dislocations in as-grown material was interpreted as a passivation of the intrinsic activity.
📜 SIMILAR VOLUMES
The paper reports measurements of electron-beam-induced current contrast c vs. temperature T and beam current Ib for two misfit dislocations in a p-type Si/SiGe sample. It is demonstrated that the different behaviour observed can be explained on the basis of the Shockley-Read-Hall recombination theo