✦ LIBER ✦

Recoil implantation of antimony into silicon

✍ Scribed by A. Grob; J.J. Grob; N. Mesli; D. Salles; P. Siffert

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Effect of argon implantation on antimony

✍ G.S. Virdi; S.K. Chattophadhyaya; N. Nath; W.S. Khokle 📂 Article 📅 1989 🏛 Elsevier Science 🌐 English ⚖ 392 KB

Some studies on antimony implanted silic

✍ G.S. Virdi; Anita Kumari; N. Nath 📂 Article 📅 1989 🏛 Elsevier Science 🌐 English ⚖ 133 KB

Megavolt arsenic implantation into silic

✍ P.F. Byrne; N.W. Cheung; D.K. Sadana 📂 Article 📅 1982 🏛 Elsevier Science 🌐 English ⚖ 305 KB

Recoil implantation of oxygen from SiO2

✍ B. Villepelet; F. Ferrieu; A. Grouillet; A. Golanski; J.P. Gailliard; E. Ligeon 📂 Article 📅 1981 🏛 Elsevier Science ⚖ 265 KB

Behavior of recoiled oxygen in through-o

✍ T. Izumi; T. Matsumori; T. Hirao; Y. Yaegashi; G. Fuse; K. Inoue 📂 Article 📅 1983 🏛 Elsevier Science ⚖ 438 KB

Some annealing properties of low-energy-

✍ S.M. Ku; W.K. Chu 📂 Article 📅 1979 🏛 Elsevier Science 🌐 English ⚖ 454 KB