๐”– Bobbio Scriptorium
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Real-time optical measurement of position

โœ Scribed by C. During


Publisher
Elsevier Science
Year
1994
Tongue
English
Weight
624 KB
Volume
4
Category
Article
ISSN
0957-4158

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Low-noise real-time measurement of the p
โœ Giacomo Langfelder; Antonio Longoni; Federico Zaraga ๐Ÿ“‚ Article ๐Ÿ“… 2008 ๐Ÿ› Elsevier Science ๐ŸŒ English โš– 883 KB

A low-noise, low-perturbing electrostatic position measurement system for capacitive MEMS sensors is described. A small-amplitude, high-frequency voltage signal is applied between the movable and fixed plates of the sensing capacitance. The resulting current is modulated by the external forces appl