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Real-time optical diagnostics for measuring and controlling epitaxial growth

✍ Scribed by D.E. Aspnes; I. Kamiya; H. Tanaka; R. Bhat; L.T. Florez; J.P. Harbison; W.E. Quinn; M. Tamargo; S. Gregory; M.A.A. Pudensi; S.A. Schwarz; M.J.S.P. Brasil; R.E. Nahory

Publisher
Elsevier Science
Year
1993
Tongue
English
Weight
573 KB
Volume
225
Category
Article
ISSN
0040-6090

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