β Scribed by Giacomo Langfelder; Antonio Longoni; Federico Zaraga
No coin nor oath required. For personal study only.
A low-noise, low-perturbing electrostatic position measurement system for capacitive MEMS sensors is described.
A small-amplitude, high-frequency voltage signal is applied between the movable and fixed plates of the sensing capacitance. The resulting current is modulated by the external forces applied to the structure. This high-frequency-shift makes it possible to filter low-noise contributes and minimize readout electrostatic perturbations on the device.
Experimental results are reported for a comb-type MEMS test structure with quasi-static, sinusoidal, and impulsive forces. Resolution and long-term stability of nanometric values have been obtained.
π SIMILAR VOLUMES
## Abstract Temperature increases due to absorption of 1.2 GHz, CW, 70 mW/cm^2^, radio frequency (RF) energy, were measured in 3.3βcmβradius homogeneous muscleβequivalent spheres, M. mulatta cadaver heads (both detached from and attached to the body) and living, anesthetized M. mulatta heads. Tempe
To address the actual challenges in neuroscience, such as real-time voltage-sensing of sub-micrometric structures like dendritic spines and multi-modal and functional imaging of cultured neurons and brain slices, we developed a dedicated instrument which offers high-performance imaging combined with
his paper deals with an implementation of the navigation parameter extraction algorithm on the TMS320C80 multimedia video processor (MVP). Especially, this paper focuses on the relative position estimation algorithm which plays an important role in the real-time operation of the overall system. Base