Real-time ERD analysis of hydrogen retention in silicon during ramped thermal anneal

✍ Scribed by K.A. Meyer; C.M. Comrie; C. Theron

• Book ID: 113822980
• Publisher: Elsevier Science
• Year: 2004
• Tongue: English
• Weight: 286 KB
• Volume: 219-220
• Category: Article
• ISSN: 0168-583X
• DOI: 10.1016/j.nimb.2004.01.156