✦ LIBER ✦
Mechanisms of defect formation and growth during thermal ramping and annealing in oxygen implanted silicon-on-insulator material : S. J. Krause, C. O. Jung, T. S. Ravi and D. E. Burke. Vacuum42(5/6), 349 (1991)
- Publisher
- Elsevier Science
- Year
- 1991
- Tongue
- English
- Weight
- 215 KB
- Volume
- 31
- Category
- Article
- ISSN
- 0026-2714
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