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Real-time diagnostics of growth of silicon-germanium alloys on hydrogen-terminated and oxidized silicon (111) surfaces by spectroscopic ellipsometry

✍ Scribed by Peter Hess; Ingo Opahle


Book ID
114086733
Publisher
Elsevier Science
Year
1999
Tongue
English
Weight
589 KB
Volume
343-344
Category
Article
ISSN
0040-6090

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