Real-time analysis of UV laser-induced growth of ultrathin oxide films on silicon by spectroscopic ellipsometry

✍ Scribed by Patrik Patzner; Andrey V. Osipov; Peter Hess

• Publisher: Elsevier Science
• Year: 2005
• Tongue: English
• Weight: 306 KB
• Volume: 247
• Category: Article
• ISSN: 0169-4332
• DOI: 10.1016/j.apsusc.2005.01.157