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Real-time and in-situ structural design of functional NiTi SMA thin films

✍ Scribed by N. Schell; R.M.S. Martins; F.M. Braz Fernandes

Book ID
106019816
Publisher
Springer
Year
2005
Tongue
English
Weight
835 KB
Volume
81
Category
Article
ISSN
1432-0630

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✍ S. Logothetidis; A. Barborica πŸ“‚ Article πŸ“… 1997 πŸ› Elsevier Science 🌐 English βš– 459 KB

In-situ and real time ellipsometry was used to study the oxidation process of thin fcc TiN x films. The films were grown by DC reactive magnetron sputtering at various negative bias voltages (V b) in order to deposit TiN x with different stoichiometries and then exposed to several gases and to air a