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Fabrication of high-quality poly-Si thin films combined with in situ real-time spectroscopic ellipsometry

✍ Scribed by Tetsuya Akasaka; Isamu Shimizu

Book ID: 115991103
Publisher: Elsevier Science
Year: 1996
Tongue: English
Weight: 261 KB
Volume: 198-200
Category: Article
ISSN: 0022-3093
DOI: 10.1016/0022-3093(96)00075-0

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