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Crystallization of thin-film Si monitored in real time by in-situ spectroscopic techniques

โœ Scribed by P. Stradins; C. W. Teplin; D. L. Young; Y. Yan; H. M. Branz; Q. Wang


Book ID
106397696
Publisher
Springer US
Year
2007
Tongue
English
Weight
192 KB
Volume
18
Category
Article
ISSN
0957-4522

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