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Reactively sputtered TiO2−x thin films with plasma-emission-controlled departure from stoichiometry

✍ Scribed by K. Zakrzewska; A. Brudnik; M. Radecka; W. Posadowski


Book ID
114086699
Publisher
Elsevier Science
Year
1999
Tongue
English
Weight
381 KB
Volume
343-344
Category
Article
ISSN
0040-6090

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