✦ LIBER ✦
Plasma emission control of reactive sputtering process in mid-frequency mode with dual cathodes to deposit photocatalytic TiO2 films
✍ Scribed by S. Ohno; D. Sato; M. Kon; P.K. Song; M. Yoshikawa; K. Suzuki; P. Frach; Y. Shigesato
- Book ID
- 108388759
- Publisher
- Elsevier Science
- Year
- 2003
- Tongue
- English
- Weight
- 241 KB
- Volume
- 445
- Category
- Article
- ISSN
- 0040-6090
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