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Reactively ion plated TiN: Effects of r.f. power density on the structure and electrochemical properties

โœ Scribed by R.T. Carson; J.H. Givens; H.S. Savage; Y.W. Lee; J.M. Rigsbee; W.J. Croisant


Publisher
Elsevier Science
Year
1991
Tongue
English
Weight
819 KB
Volume
204
Category
Article
ISSN
0040-6090

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