Preparation of titanium nitride films by reactive ion plating and the influence of discharge current density on the film properties: A Rousseau and J Guille, Vacuum, 38, 1988, 443–448

• Publisher: Elsevier Science
• Year: 1989
• Tongue: English
• Weight: 306 KB
• Volume: 39
• Category: Article
• ISSN: 0042-207X
• DOI: 10.1016/0042-207x(89)90377-1