✦ LIBER ✦
Preparation of titanium nitride films by reactive ion plating and the influence of discharge current density on the film properties : A. Rousseau and J. Guille. Vacuum 38, 443 (1988)
- Publisher
- Elsevier Science
- Year
- 1989
- Tongue
- English
- Weight
- 123 KB
- Volume
- 29
- Category
- Article
- ISSN
- 0026-2714
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