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Reactive unbalanced magnetron sputter deposition of polycrystalline TiN/NbN superlattice coatings

✍ Scribed by X. Chu; S.A. Barnett; M.S. Wong; W.D. Sproul

Book ID: 107930323
Publisher: Elsevier Science
Year: 1993
Tongue: English
Weight: 381 KB
Volume: 57
Category: Article
ISSN: 0257-8972
DOI: 10.1016/0257-8972(93)90331-h

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