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Reactive magnetron sputter deposition of polycrystalline vanadium nitride films

✍ Scribed by Chu, X.

Book ID: 121715301
Publisher: AVS (American Vacuum Society)
Year: 1996
Tongue: English
Weight: 872 KB
Volume: 14
Category: Article
ISSN: 0734-2101
DOI: 10.1116/1.580180

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