✦ LIBER ✦

Deposition of TiN/CrN hard superlattices by reactive d.c. magnetron sputtering

✍ Scribed by Harish C. Barshilia; K. S. Rajam

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Preferred orientation and hardness enhan

✍ Q. Yang; C. He; L.R. Zhao; J-P. Immarigeon 📂 Article 📅 2002 🏛 Elsevier Science 🌐 English ⚖ 112 KB

Deposition of SiNx by reactive d.c. magn

✍ PeterJ. Clarke 📂 Article 📅 1977 🏛 Elsevier Science 🌐 English ⚖ 35 KB

Reactive unbalanced magnetron sputter de

✍ X. Chu; S.A. Barnett; M.S. Wong; W.D. Sproul 📂 Article 📅 1993 🏛 Elsevier Science 🌐 English ⚖ 381 KB

Influence of silicon content on the micr

✍ Hetal N. Shah; R. Jayaganthan; Davinder Kaur 📂 Article 📅 2010 🏛 Elsevier Science 🌐 English ⚖ 776 KB

Adhesion of thin TiN films prepared by r

✍ J. Musil; V. Poulek; V. Dušek 📂 Article 📅 1984 🏛 Springer 🌐 English ⚖ 304 KB

D.C. magnetron sputter deposition of ind

✍ P.C. Karulkar; M.E. McCoy 📂 Article 📅 1981 🏛 Elsevier Science 🌐 English ⚖ 72 KB