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Reactive sputtering of carbon and carbide targets in nitrogen

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📜 SIMILAR VOLUMES

Target poisoning during reactive sputter

✍ M.M. Waite; S. Ismat Shah 📂 Article 📅 2007 🏛 Elsevier Science 🌐 English ⚖ 488 KB

Reactive and non-reactive high rate sput

✍ K. Fuchs; P. Rödhammer; E. Bertel; F.P. Netzer; E. Gornik 📂 Article 📅 1987 🏛 Elsevier Science 🌐 English ⚖ 813 KB

Preparation of cubic boron nitride films

✍ Schütze, A.; Bewilogua, K.; Lüthje, H.; Kouptsidis, S. 📂 Article 📅 1996 🏛 Elsevier Science 🌐 English ⚖ 543 KB

The problem of reactive sputtering and c

✍ K. Steenbeck; E. Steinbeiß; K.-D. Ufert 📂 Article 📅 1982 🏛 Elsevier Science 🌐 English ⚖ 450 KB

Reactively sputtered nitrides and carbid

✍ Sproul, William D. 📂 Article 📅 1986 🏛 AVS (American Vacuum Society) 🌐 English ⚖ 709 KB

Current-Voltage Characteristic of Reacti

✍ Salm, J. ;Steenbeck, K. ;Steinbeiss, E. 📂 Article 📅 1979 🏛 John Wiley and Sons 🌐 English ⚖ 157 KB