𝔖 Bobbio Scriptorium
✦   LIBER   ✦

Reactive ion etching of GaN/InGaN using BCl3 plasma

✍ Scribed by H.F Hong; C.K Chao; J.I Chyi; Y.C Tzeng


Book ID
114193014
Publisher
Elsevier Science
Year
2003
Tongue
English
Weight
148 KB
Volume
77
Category
Article
ISSN
0254-0584

No coin nor oath required. For personal study only.


πŸ“œ SIMILAR VOLUMES