✦ LIBER ✦

Reactive Ion Etching of Benzocyclobutene Using a Silicon Nitride Dielectric Etch Mask

✍ Scribed by Schier, Michael

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Batch reactive ion etching of gallium ni

✍ Mark Dineen; Sean Lee; Ligang Deng; Andrew L. Goodyear; Colin Welch 📂 Article 📅 2004 🏛 John Wiley and Sons 🌐 English ⚖ 104 KB

Deep reactive ion etching of borosilicat

✍ Akashi, T; Yoshimura, Y 📂 Article 📅 2006 🏛 Institute of Physics 🌐 English ⚖ 629 KB

Reactive ion etching of PECVD silicon ni

✍ Flávia R. de Almeida; R.Katsuhiro Yamamoto; Homero S. Maciel 📂 Article 📅 1993 🏛 Elsevier Science 🌐 English ⚖ 311 KB

Shallow and deep dry etching of silicon

✍ Ü. Sökmen; A. Stranz; S. Fündling; S. Merzsch; R. Neumann; H.-H. Wehmann; E. Pei 📂 Article 📅 2010 🏛 Springer-Verlag 🌐 English ⚖ 969 KB

Fabrication of nanoporous silicon dioxid

✍ W.M. Zhang; J. Li; L.X. Cao; Y.G. Wang; W. Guo; K.X. Liu; J.M. Xue 📂 Article 📅 2008 🏛 Elsevier Science 🌐 English ⚖ 226 KB

Formation of silicon nanograss and micro

✍ Mehran, M.; Sanaee, Z.; Mohajerzadeh, S. 📂 Article 📅 2010 🏛 The Institution of Engineering and Technology 🌐 English ⚖ 395 KB