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Reaction Mechanism of Chemical Vapor Deposition Using Tetraethylorthosilicate and Ozone at Atmospheric Pressure

✍ Scribed by Kawahara, Takaaki; Yuuki, Akimasa; Matsui, Yasuji

Book ID: 125459409
Publisher: Institute of Pure and Applied Physics
Year: 1992
Tongue: English
Weight: 836 KB
Volume: 31
Category: Article
ISSN: 0021-4922
DOI: 10.1143/jjap.31.2925

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