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Boundary Layer Chemistry Probed by in Situ Infrared Spectroscopy during SiO 2 Deposition at Atmospheric Pressure from Tetraethylorthosilicate and Ozone

✍ Scribed by Flores, Lucio D.; Crowell, John E.


Book ID
126848332
Publisher
American Chemical Society
Year
2005
Tongue
English
Weight
328 KB
Volume
109
Category
Article
ISSN
0022-3654

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