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RBS/channeling analysis of epitaxial films with Nb buffer layer on sapphire substrate

✍ Scribed by S. Yamamoto; H. Naramoto

Book ID
114165540
Publisher
Elsevier Science
Year
2002
Tongue
English
Weight
88 KB
Volume
190
Category
Article
ISSN
0168-583X

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## Abstract La~0.67~Sr~0.33~MnO~3~ (LSMO) manganite thin films were deposited using a magnetron dc sputtering on single crystalline GaAs(001) substrates covered by MgO buffer layers with the goal to fabricate, using MEMS technology, a microbolometer operating at room temperature. The crystalline pe