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RBS-ERDA, XPS and XRD characterizations of PECVD tungsten nitride films

✍ Scribed by C. Meunier; C. Monteil; C. Savall; F. Palmino; J. Weber; R. Berjoan; J. Durand

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Characterisation of thin sputtered silic

✍ A. Markwitz; H. Baumann; E. F. Krimmel; K. Bethge; P. Misaelides 📂 Article 📅 1993 🏛 Springer 🌐 English ⚖ 462 KB

Characterization of Cobalt Molybdenum Ni

✍ Kenichiro Hada; Junko Tanabe; Shinzo Omi; Masatoshi Nagai 📂 Article 📅 2002 🏛 Elsevier Science 🌐 English ⚖ 550 KB

Depth profiling of W, O and H in tungste

✍ O. Bohnke; G. Frand; M. Fromm; J. Weber; O. Greim 📂 Article 📅 1996 🏛 Elsevier Science 🌐 English ⚖ 665 KB

Effects of composition and structure on

✍ S. Yamamoto; K. Takano; A. Inouye; M. Yoshikawa 📂 Article 📅 2007 🏛 Elsevier Science 🌐 English ⚖ 175 KB

TEM, XPS and FTIR characterization of sp

✍ J. Wei; P. Hing; Z. Q. Mo 📂 Article 📅 1999 🏛 John Wiley and Sons 🌐 English ⚖ 206 KB

Structural studies of amorphous and crys

✍ Y.G Shen; Y.W Mai 📂 Article 📅 2000 🏛 Elsevier Science 🌐 English ⚖ 810 KB